In view of the versatility requirement of the inertial switch in fuze, a novel inertial switch with threshold adjusting is designed. The systemic model of the cantilever MEMS switch was established in CoventorWare(Architect module), and the static and the dynamic characteristic were studied based on the systemic model. The simulation results show that the acceleration threshold present an almost liner relationship with the changed bias voltage, and the acceleration threshold can be adjusted by adjusting the bias voltage of the switch. The acceleration threshold is controlled from 1000g to 4000g, adjusting 500g every time. The longest response time of the switch is 63.44μs, and the contact time is infinite, showing a higher trigger sensitivity and a favorable contact effect. The depth of the 4-micron-thick silicon cantilever would have ±0.1μm actual error during depositing process, so the Monte Carlo method was used to calculate the pull-in voltage and the performance of switch when the thickness of cantilever changed between 3.9~4.1μm during simulation moment. The simulation results show that the cantilever error is ±0.1 μm, whose influence on the switch’s pull-in voltage and the response time was within the design index.
Journal of Chinese Inertial Technology