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微/纳米制造技术的摩擦学挑战 预览 被引量:33

Challenges to Tribology Arisen from the Development of Micro- and Nano-Manufacturing Technology
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摘要 评述了国内外航天、信息和军事等高技术领域中微/纳米制造技术的研究现状和发展趋势,介绍了微/纳米制造技术特征及其关键技术问题,揭示了当器件的尺度由毫米量级减小到微米甚至纳米量级时,微器件材料表面和界面的摩擦学(摩擦磨损及润滑)、力学和化学等及其控制方法是微/纳米制造研究中急需解决的关键技术问题.这些问题的解决对摩擦学研究提出了严峻挑战,新的摩擦学理论和技术的出现将为微/纳米制造技术的发展以及相关问题的解决提供保障. A review was given on the development of micro- and nano-manufacturing technology and its challenges to tribology. It was pointed out that with the ceaseless development of high technologies of spaceflight, information, instruments, and military equipment towards micromation and high-precision, micro- and nano-manufacturing technology has been increasingly focused on. With the size of device decreasing from millimeter scale to micrometer scale or even nanometer scale, surface forces become a dominant role. In this case the conventional rules and control methods for the surface and interface behaviors of micro-sized devices could be invalid. It is imperative to find new theories and methodologies to deal with the surface and tribological problems concerning the micro- and nano-scale devices, including friction, wear, lubrication behavior, and mechanical and chemical properties. Moreover, it was suggested that many of the vital technologies in the micro- and nano-manufacturing would be related to nanoscale wear, nanogap lubrication, manufacture and modification of low-energy surfaces, friction and adhesion between the interfaces, active control of friction, and ultra-lubrication. It was anticipated that solving those problems would contribute greatly to speed up the development of micro- and nano-manufacturing technology.
作者 雒建斌 何雨 温诗铸 钟掘 Luo, Jian-Bin[1]; He, Yu[1]; Wen, Shi-Zhu[1]; Zhong, Jue[2]
机构地区 清华大学 中南大学
出处 《摩擦学学报》 EI CAS CSCD 北大核心 2005年第3期 283-288,共6页 Tribology
基金 国家自然科学基金,国家重点基础研究发展计划(973计划)
关键词 微/纳米制造技术 表面与界面 摩擦学 挑战 Friction Interfaces (materials) Lubrication Reviews Surface treatment Surfaces Technology Tribology
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参考文献18

  • 1Nadim M. An introduction to microelectromechanical systems engineering[M]. Boston : Artech House, 2000. 被引量:1
  • 2Soong R K, Bachand G D, Neves H P, et al. Powering an inorganic nanodevice with a biomolecular motor[J]. Science, 2000, 290 (5496): 1 555-1 558. 被引量:1
  • 3雒建斌 徐进 段芳莉.原子级光滑表面加工机理研究[C]..自然科学基金委杰出青年基金十周年研讨会[C].,2004.. 被引量:1
  • 4Lei H, Luo J B. CMP of hard disk substrate using a colloidal SiO2 slurry: preliminary experimental investigation[J]. Wear, 2004, 257 (5-6): 461-470. 被引量:1
  • 5Luo J F, Dornfeld D A. Material removal mechanism in chemical mechanical polishing: theory and modeling[J]. IEEE Transaction on Semiconductor Manufacturing, 2001, 14 (2): 112-118. 被引量:1
  • 6Luo J B. Polishing for atomic smooth surface[C].In: The 4th China International Symposium on Tribology. Xi'an, Nov, 8-11, 2004. 被引量:1
  • 7Xu J, Luo J B, Lu X C, et al. Atomic scale deformation in the solid surface induced by nanoparticle impacts[J]. Nanotechnology, 2005, 16: 859-864. 被引量:1
  • 8Zhou L, Kato K, Vurens G, et al. The effect of slider surface texture on flyability and lubricant migration under near contact conditions[J]. Tribology International, 2003, 36 (4-6): 269-277. 被引量:1
  • 9Peng Y Q, Lu X C, Luo J B. Nanoscale effect on ultrathin gas film lubrication in hard disk drive[J]. Journal of Tribology Transactions of The ASME, 2004, 126 (2): 347-352. 被引量:1
  • 10Tanner D M, Walraven J A, Barnes S M, et al. Reliability of a MEMS torsional ratcheting actuator[C]. 39th Annual International Reliability Physics Symposium, Orlando, Floida, 2001. 被引量:1

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