期刊文献+

SOI基光学电流传感器的设计与仿真 预览

Design and Simulation of Optical Current Sensor Based on SOI
在线阅读 下载PDF
收藏 分享 导出
摘要 将光纤与微电了机械系统(MEMS)技术相结合,设计了一种新颖的检测50Hz高压交流电的光学电流传感器(OCS)。用ANSYS软件分析了器件的模态、动态响应与热膨胀特性,并通过Matlab软件模拟了器件的工作性能。模拟计算表明:ANSYS与理论公式得到的结果基本一致;传感器的量程为100~3600A,对于大电流下的灵敏度可达到0.02dB/A,温度变化±50K时传感器相应的测试误差为0.2%。 A novel optical current sensor to detect 50 Hz high alternating current is designed based on fiber and MEMS. The principle and design of the sensor is explained. Model analysis,dynamic response and heat expansion are analyzed by ANASYS, and the performance of the sensor is simulated by Matlab, The simulation shows ; the result gotten by ANASYS is nearly identical with that calcualted by formulae ; the alternating current whose peak value is 100 A-3 600 A can be detected,and the sensitivity at high current can reach 0.02 dB/ A;when temperature varies ±50 K,the measurement error of the sensor is 0,2 %.
作者 赵本刚 刘玉菲 穆参军 徐静 吴亚明 ZHAO Ben-gang, LIU Yu-fei , MU Can -jun , XU Jing , WU Ya-ming (1. State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology,Ghinese Academy of Sciences, Shanghai 200050, China; 2. Graduate School, Chinese Academy of Sciences, Beijing 100039, China)
出处 《光电子.激光》 EI CAS CSCD 北大核心 2006年第12期 1447-1452,共6页 Journal of Optoelectronics·laser
基金 国家自然科学基金资助项目(60572022)
关键词 微电子机械系统(MEMS) 光学电流传感器(OCS) 绝缘体上的Si(SOI) 扭转微镜 温度补偿 micro-electronic mechanics system(MEMS) optical currrent sensor(OCS) silicon on insulator (SOI) torsional micro-mirror temperature compensation
作者简介 赵本刚(1977-),男,博士研究生,主要研究方向为光学MEMS器件设计与制作.E-mail:zbg@mail.sim.ac.cn
  • 相关文献

参考文献11

  • 1LIUYe WANGCai-tang SUYan-min etal.Development of study of optical current transducer used ini power system[J].电力系统自动化,2000,24(17):60-64. 被引量:1
  • 2王廷云,郭强,唐明珏,周青,石志东,郑绳楦.磁致伸缩效应光纤微分干涉电流传感器[J].光电子.激光,2002,13(9):923-925. 被引量:8
  • 3王廷云,常丹华.利用平衡测试原理的光纤电流传感器[J].光电子.激光,1998,9(1):25-27. 被引量:3
  • 4Leung C K Y.Fiber optic sensors in concrete:the future[J].NDT & E International,2001,34:85-94. 被引量:1
  • 5Hewitt P D,Reed G T.Improved modulation performance of a silicon p-i-n device by trench isolation[J].Journal of Lightwave Technology,2001,13 (9):387-390. 被引量:1
  • 6张可畏,王宁,段雄英,邹积岩,黄智宇.用于电子式电流互感器的数字积分器[J].中国电机工程学报,2004,24(12):104-107. 被引量:105
  • 7Ribas R P,Lescot J,Leciercq J L,et al.Micromachined microwave planar spiral inductors and transformers[J].IEEE Transactions on Microwave Theory and Techniques,2000,48(8):1326-1335. 被引量:1
  • 8Kaienburg J R,Schellin R.A novel silicon surface micromachining angle sensor[J].Sensor and Actuators A,1999,73:68-73. 被引量:1
  • 9Norihiro A,Masaru T,Vladimir V,et al.Silicon micro-optical scanner[J].Sensors and Actuators,2000,83:284-290. 被引量:1
  • 10Martin V B,Nabeel A R.Foundations for low-loss fiber gradient-index lens pair coupling with the self-imaging mechanism[J].Applied Optics,2003,42 (3):550-565. 被引量:1

二级参考文献21

  • 1[1]Ning Y U, Wang Z P, Palmer A W, et al. Recent progress in optical current sensing technipue[J].Rev.Sci.Instrum.,1995,66(5):097-3111. 被引量:1
  • 2[2]JIANG De-sheng,HE Wei.Review of applications for Fiber Bragg Grating Sensors[J].Journal of Optoelec-tronics. Laser(光电子.激光),2002,13(4):20-430.(in Chinese) 被引量:1
  • 3[3]Emerging Technologies Working Group,Fiber Optic Sensors Working Group.Optical current transducers for power systems:.Review[J].IEEE Trans.Power Delivery,1994,9(4):778-1788. 被引量:1
  • 4[4]Livingston J D.Magnetomechanical properties of amorphous metals[J].Phys.Stat.Sol.(a),1982,70:91-596. 被引量:1
  • 5[5]T Wang, C Luo, S Zheng.A fiber-optic current sensor based on differentiating Sagnac interferometer[J].IEEE Trans.on Instrumentation and Measurement,2001,50(3):05-708. 被引量:1
  • 6[6]WANG Qing-zheng,HU Yu,LIN Chong-lin.Photodetector Technology[M].Beijing:lectronic Industrial Press,1995. 被引量:1
  • 7Chu B C B,Sensors Actuators A,1993年,37/38卷,571页 被引量:1
  • 8Ray W F, Davis R M. Wide bandwidth rogowski current transducers:PartⅡ: the integrator [J]. EpE Journal, 1993, 3(2): 116-122. 被引量:1
  • 9Ray W F, Hewson C R. High performance rogowski current transducers [C]. IEEE Industry Application Conference, Roma, Italy,2000, 5 : 3083-3090. 被引量:1
  • 10D'Antona G, Lazzaroni M, Ottoboni R, et al. AC current-to-voltage transducer based on digital processing of Rogowski coils signal [C]. Sensors for Industry Conference, 2002.2nd ISA/IEEE, Houston,TexasUSA, 2002, 19-21: 72-77. 被引量:1

共引文献113

投稿分析

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部 意见反馈