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微机电系统的现状与展望 预览 被引量:9

Current status and future prospect of MEMS
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摘要 在过去20多年中,微机电系统(MEMS)已经从早期的技术开发、设备探索和实验室研究的阶段发展到当前的实际应用阶段,并逐渐扩展到许多新的研究和探索领域,MEMS已经成为21世纪最具潜力的研究领域之一。对MEMS进行了简要的介绍,包括MEMS应用,MEMS的市场情况,以及3种主要的MEMS微制造技术,即体微制造、面微制造和LIGA技术。最后,提出了MEMS将来研究和发展的趋势。 During the last two decades, microelectromechanical systems (MEMS)has advanced from the early stage of technology development, device exploration, and laboratory research, to the stage of practical applications, and is expanding to many new areas of exploration and research. MEMS technology has become one of the most promising fields in the 21st century. A tutorial review of MEMS is presented, including current and potential applications of MEMS ,the state of the MEMS market,as well as three major micromachining processes employed to MEMS devices, namely bulk micromachining, surface micromachining and LIGA technology. Finally, the future trends of MEMS research and development are suggested.
作者 陆敬予 张飞虎 张勇 LU Jing-yu, ZHANG Fei-hu, ZHANG Yong ( School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, China)
出处 《传感器与微系统》 CSCD 北大核心 2008年第2期 1-3,7,共4页 Transducer and Microsystem Technology
关键词 微机电系统 微细加工 展望 microelectromechamical systems (MEMS) micromachining prospect
作者简介 陆敬予(1984-),男,湖南临湘人,硕士研究生,研究领域为超精密加工与微机电技术。
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