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二氧化钛薄膜的制备及退火对其形貌、结构的影响 被引量:2

Preparation of TiO2 Thin Films and Effect of Annealing on the Morphology and Structure
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摘要 利用磁控溅射技术,在石英基片上沉积Ti膜,分别在400、600、700、900℃的大气中退火获得TiO2薄膜。采用这种制备方式获得的TiO2薄膜呈现不同的颜色,退火温度为400℃的样品为暗紫红色,600℃时为黑色,而在700℃和900℃时均为黄色。采用X射线衍射、扫描电子显微镜(SEM)以及Raman光谱等手段研究了退火温度对TiO2薄膜的结构和形貌的影响。结果表明:退火温度为400℃时,TiO2薄膜为锐钛矿相,温度升高至600℃时,几乎转变为金红石晶相,但仍存在微量锐钛矿相,温度升高至700℃以上,则完全转变为金红石晶相。由XRD衍射图可知退火温度为700℃和900℃时,薄膜的金红石相沿(101)晶面择优取向。 Ti thin films were deposited by magnetron sputtering on fused-quartz substrates,then they turn into TiO2 films by annealing in air at 400,600,700,900℃,respectively.The TiO2 films preparaed by this new method had different colours,the sample annealed at 400℃ was dark purple,at 600℃ was black,while at 700℃ and 900℃ were yellow.The structure and morphology of TiO2 films were studied experimentally by X-ray diffraction,scanning electronic microscopy and Raman spectroscopy.TiO2 film annealed at 400℃ was anatase,at 600℃,TiO2 film was mainly rutile phase,in which also found trace quantities of anatase.At 700℃,the rutile phase has formed completely.At 700℃ and 900 ℃,the rutile phase TiO2 films had an obvious(101) preferred orientation.
作者 卫会云 邢杰 张笑妍 巩毛毛 李伟民 WEI Hui-Yun XING Jie ZHANG Xiao-Yan GONG Mao-Mao LI Wei-Min(School of Materials Science and Technology,China University of Geosciences,Beijing 100083,P.R.China)
出处 《光谱实验室》 CAS CSCD 北大核心 2011年第6期 2961-2964,共4页 Chinese Journal of Spectroscopy Laboratory
基金 中国地质大学(北京)大学生创新性实验计划项目(51900265029) 中国地质大学(北京)矿物岩石材料开发应用国家专业实验室开放课题(09A004)
关键词 二氧化钛薄膜 退火温度 锐钛矿 金红石 TiO2 Thin Film Annealing Temperature Anatase Rutile
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