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RF-PCVD法制备纳米TiO_2粒径分布的数值模拟及进料浓度的影响

Modelling the size distribution of TiO_2 nanoparticles synthesized by RF-Plasma CVD and effect of input concentration
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摘要 射频等离子体反应器适用于气相法快速合成高纯纳米微晶.针对小流量TiCl4氧化合成TiO2纳米微晶反应体系,在Matlab软件中采用有限差分法,以求解温度场的二阶偏微分方程模拟出反应器内的温度分布.通过将温度场与长大过程动力学方程偶联,沿每条气体流线计算,模拟出最终TiO2纳米微晶粒径及其粒度分布.不同进料浓度条件下的数值解与实验结果基本吻合.由于流动状态和浓度分布过于理想以及未考虑长大过程中传质因素的影响等,数值解与实验结果还存在一定的差距. Radio-frequency(RF) plasma reactors are well suitable to high-rate generation of high pure nanoparticles in vapor synthesis methods.In the synthesis system of TiO2 nanoparticles with little gas flow which concludes titanium tetrachloride and oxygen,the temperature distribution was computed by solving a second-order partial differential equation by the finite difference method in Matlab.By coupling the temperature distribution with kinetic equations of particle growth,the final average size and the size distribution of TiO2 nanoparticles were obtained by calculating along each gas streamline.The simulation results computed at different input concentrations agree with experimental data,on the whole.As the assumptions of the gas flow and concentration distribution in the system are sample and without considering the effect of mass transportation on the final particle size in the growth process,the proposed model deserves to be further improved.
作者 王俊文 董占祥 赵煜 张林香 WANG Jun-wen,DONG Zhan-xiang,ZHAO Yu,ZHANG Lin-xiang College of Chemistry and Chemical Engineering,Taiyuan University of Technology,Taiyuan 030024,China
出处 《北京科技大学学报》 EI CAS CSCD 北大核心 2011年第12期 1534-1537,共4页 Journal of University of Science and Technology Beijing
基金 山西省归国留学人员基金资助项目(2007-36) 山西省青年科技基金资助项目(20051009)
关键词 纳米微晶 二氧化钛 等离子体 化学气相沉积 数值方法 nanoparticles titanium dioxide plasma chemical vapor deposition(CVD) numerical methods
作者简介 通信作者,E-mail:wangjunwen@tyut.edu.cn
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参考文献13

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