The progress in the synthesis of metal and metal oxide nano-materials by supercritical fluid deposition was reviewed. The unique physical properties of supercritical fluid such as very high solubility and zero surface tension, as well as the application of supercritical fluid in preparation of metal and metal oxide nanoparticles or thin films on planar and fine-pattern substrates were introduced. The mechanism of deposition of nanoparticles and thin films in supercritical fluid was described. The effects of deposition temperature, precursor concentration, pressure, and Ha concentration on deposition rate were discussed. The future research directions of supercritical fluid deposition were pointed out.
Electroplating ＆ Finishing