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MEMS平面S型锥形弹簧的特性分析研究 被引量:1

Study on Characteristics of MEMS Planar S-Form Conical Spring
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摘要 针对MEMS平面S型等直梁弹簧压杆稳定性及抗共振性能较差等问题,提出了一种MEMS平面S型锥形弹簧,推导出平面锥形弹簧y向刚度系数公式,并通过仿真实验对理论公式进行验证,发现在集中力作用下,弹簧刚度系数的理论值与仿真值的平均误差小于1.58%。进一步分析了各结构参数对弹簧刚度系数的影响。结果表明,锥形弹簧刚度系数随着弹簧线宽B及弹簧高度H的增加而增加,随着弹簧弯半径R、段数n、弹簧直梁增量λ,以及弹簧首段直梁长度L1的增加而减小。通过对两种S型弹簧的性能对比,得到锥形弹簧在相同刚度下,轴向空间利用率、压杆稳定性以及抗共振性能方面均优于等直梁弹簧。 A MEMS planar S-form conical spring has been proposed for the poor column stability, anti-resonance behavior etc. of equal straight beam spring. The stiffness coefficient formula in the Y direction of conical spring has been obtained and it has been verified by simulating. The average error between the theoretical value and the results of the simulation is less than 1.58 % while a concentrated force is applied. Then the effect of the structure parameters on the stiffness coefficient of spring is analyzed. The results showed that the stiffness coefficient of conical spring increases with the increase of spring width B and spring height H, and decreases as the spring radius R, the number of segments n, the increment of straight beam )λ and the length Of the first straight beam L1 become large. At last, with the same rigidity in the y direction, the performances of two S-formed springs are comparatively analyzed. The results revealed that the axial space utilization, column stability and anti-resonance behavior of conical spring are superior to the equal-L spring.
作者 周织建 聂伟荣 席占稳 王晓锋 程建建 ZHOU Zhijian, NIE Weirong, XI Zhanwen, WANG Xiaofeng, CHENG Jianjian (School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, P. R. China)
出处 《微电子学》 CAS CSCD 北大核心 2014年第4期559-564,共6页 Microelectronics
关键词 S型锥形弹簧 MEMS 刚度系数 压杆稳定性 抗共振性能 S-form conical spring MEMS Stiffness coefficient Column stability Anti-resonance behavior
作者简介 周织建(1989-),男(汉族),博士研究生,主要从事MEMS惯性器件的设计与工艺研究。 聂伟荣(1969-),女(汉族),博士,副教授,主要从事MEMS器件的设计与工艺研究。
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