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基于性能评估的EWMA控制器在线优化方法 预览

Online optimization method of EWMA controller based on performance assessment
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摘要 为解决半导体制造业中小批量、多品种的生产特性和设备老化造成的控制器性能下降的问题,针对最常用的指数加权移动平均控制器,提出一种基于性能评估的在线优化方法。在性能评估过程中,以时间序列分析中定义的输出均方差作为评判基准,提出一种新的性能评价指标。通过评估EWMA控制器的性能得到控制器当前的最优参数并自动整定,同时结合移动窗口技术实现在线优化,使控制器性能始终保持在最佳状态。为验证方法的可行性和有效性,以化学机械抛光过程的在线优化问题为实例进行了仿真实验。 To solve the manufacturing characteristic of multi-type, small-batch and the quality reduction of controller caused by aging equipments in semiconductor manufacturing industries, an online optimization method based on per- formanee assessment was proposed for the most common used Exponentially Weighted Moving Average (EWMA) controller. In the process of performance evaluation, a new index was proposed by taking the mean square error de- fined in the time series analysis as the evaluation benchmark. The performance of EWMA controller was evaluated to obtain the current optimal parameters of controller and to auto-tuning. Meanwhile, online optimization was realized by combining with the moving window technology, which could make the control system maintain the optimum con- dition all the time. In addition, simulation of chemical mechanical polishing process was carried out to verify the fea- sibility and effectiveness of proposed method.
作者 陈良 葛翠翠 王飞龙 CHEN Liang , GE Cui-cui , WANG Fei-long (School of Mechanical and Electric Engineering, Soochow University, Suzhou 215021, China)
出处 《计算机集成制造系统》 EI CSCD 北大核心 2014年第11期2857-2862,共6页 Computer Integrated Manufacturing Systems
基金 国家自然科学基金资助项目(60904039) 江苏省科技计划资助项目(BC2011084).
关键词 指数加权移动平均控制器 在线优化 性能评估 自动整定 exponentially weighted moving average controller online optimization performance assessment auto-tuning
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