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用于聚合物介电材料的双硅氧烷链接的环化聚合物 预览

Disiloxane-Bridged Cyclopolymer as Polymer Dielectrics
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摘要 研究了含有硅氧烷基团的螺旋环化聚合物PbMA的介电性能,PbMA结构中含有类似PMMA的主链和四甲基双硅氧烷侧环.PbMA可以旋涂到n型高掺杂硅单晶片(n—Si)上形成高度均一的膜,用于介电测量,研究了其介电性质和I—V特性曲线.PbMA在10-10^5频率范围有远低于PMMA的介电常数(低于2.61,其热稳定性也优于PMMA.I-V数据表明金属/PbMA/n—Si组成了不同导通方向的结,导通方向依赖于沉积在PbMA膜上的Au或Al层. We studied the dielectric properties of organosilicon-containing helical cyclopolymer PbMA which consists of PMMA main chains and tetramethyldisiloxane side rings. PbMA formed films with excellent uniformity through spin-coating onto highly n-doped silicon (n-Si) wafers for constructing devices of dielectric measurements, on which the dielectric properties and I-V characteristics of PbMA were studied. PbMA has a much lower dielectric constant (lower than 2.6) in the frequency range of 10-105 Hz, and better thermal stability than PMMA does. I-V data showed that the metal/PbMA/n-Si devices have different conducting directions, depending on whether Au or Al deposited over PbMA layers.
作者 邓昶 刘和文 Chang Deng, He-wen Liu( Key Laboratory of Soft Matter Chemistry, Chinese Academy of Sciences, Department of Polymer Science and Engineering, University of Science and Technology of China, Hefei 230026, China)
出处 《化学物理学报》 SCIE CAS CSCD 2017年第5期571-575,I0002共6页 Chinese Journal of Chemical Physics
基金 This work was supported by the National Natural Science Foundation of China (No.51673181).
关键词 环化聚合物 硅氧烷 聚甲基丙烯酸甲酯 介电层 Polymer dielectrics Spin-coating film Disiloxane-bridged cyclopolymer
分类号 O [理学]
作者简介 Author to whom correspondence should be addressed. E-mail: lhewen@ustc.edu.cn
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