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沉积时间对Sn-Mg共掺ZnO薄膜光电性能的影响

Effect of deposition time on the photoelectric properties of Sn-Mg co-doped ZnO thin films
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摘要 采用超声喷雾热解法在石英玻璃衬底上,在衬底温度为440℃,喷嘴到衬底距离为4 cm,掺杂原子(Zn∶Mg∶Sn)比例为97.6∶2∶0.4,载气流量为0.8 L/min的固定条件下,制备了不同薄膜沉积时间(5 min、7 min、9 min、11 min)的Sn-Mg共掺的ZnO薄膜。并用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、光致发光谱(PL)、紫外可见分光光度计(UV-VIS)、薄膜测厚仪(SCG-10)和伏安特性曲线(I-V)对薄膜的结构、表面形貌、发光性能、透过率、膜厚和电学性能进行了一系列表征。当沉积时间为7 min时,XRD表明,薄膜的(101)峰强度最大,择优取向明显。SEM图显示薄膜表面致密光滑,颗粒均匀,尺寸最大且形貌最佳。PL谱在372 nm处的发射峰强度最大,峰形最尖锐,所有薄膜的透过率在可见光区域都超过了80%,表现出了很好的光透过性能。从薄膜的I-V特性曲线可计算出此时的电阻最小,导电性能最佳。 The ultrasonic spray pyrolysis was used on quartz glass substrate under the fixed conditions which are substrate temperature of 440 ℃,distance from nozzle to substrate of 4 cm,doped Zn∶Mg∶Sn of 97.6∶2∶0.4 and carrier gas flow of 0.8 L/min.Sn-Mg co-doped ZnO films with different deposition time of 5 min,7 min,9 min and 11 min were prepared.The film structure and surface morphology,luminescence properties,transmittance,the film thickness and electrical properties of the films were characterized by X-ray diffraction(XRD),scanning electron microscope(SEM), photoluminescence(PL),ultraviolet visible(UV-VIS) spectrophotometer,film thickness(SCG-10) and current-voltage(I-V) curves.When the deposition time is 7 min,XRD pattern shows that the peak intensity of(101) film is maximum, and the preferred orientation of the growth is obvious.The SEM diagram shows that the surface of the film is dense and smooth,the particles are uniform,the size is the largest,and the shape is the best.The emission peak intensity is the largest,and the peak shape is the sharpest at 372 nm.The transmittance of all films is over 80% in the visible region,which shows excellent light transmission.By comparing and calculating with the change of the band gap value, the results show that when the deposition time is 7 min,the band gap value of the film is maximum.According to the I-V characteristic curve of the film,the resistance is the smallest,and the conductivity is the best.
作者 王玉新 崔潇文 臧谷丹 赵帅 李真 王磊 丛彩馨 WVNG Yu-xin;CUI Xiacrwen;ZANG Gu-dan;ZHAO Shuai;LI Zhen;WANG Lei;CONG Cai-xin(School of Physics and Electronic Technology,Liaoning Normal University, Dalian 116029,China)
出处 《光电子.激光》 EI CAS CSCD 北大核心 2019年第2期123-128,共6页 Journal of Optoelectronics·laser
基金 辽宁省教育厅科学研究一般项目“基于低成本溶液生长n-ZnO纳米棒/p-聚芴复合结构的有机无机异质结白光LED研究”(L2015292)资助项目.
关键词 超声喷雾热解法 Sn-Mg共掺 ZNO薄膜 沉积时间 光电特性 ultrasonic spray pyrolysis Sn-Mg co-doped ZnO thin film deposition time photoelectric property
作者简介 王玉新(1974-),女,辽宁辽阳人,博士,副教授,主要从事光电信息材料与器件方面的研究.,E-mail:yuxinwang178@sina.com.
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