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2kW射频板条CO2激光器电极表面膜特性研究

Film Characteristics of Electrode Surface for 2kW RF Slab CO2 Laser
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摘要 国内高功率射频板条CO2激光器铜电极表面没有镀介质膜,裸铜在放电程中,表面容易氧化,受激光电子溅射及激光损伤,波导损耗大,影响了激光器的出光效率。针对以上问题,课题组研制了Al+Al2O3混合波导介质膜,对该电极膜层进行了成分分析,测试了抗电子溅射能力,检测了膜层表面对CO2光波反常色散特性。结果表明,镀膜层主要成分为Al和O,原子数Al∶O远大于2∶3,膜层结构为Al+Al2O3,满足电极镀膜层结构设计。测试了不同角度下的反射率,在掠入射角为10°~170°时,Al2O3膜层对波长10.6μm CO2光波的最高反射率为85%。Al2O3镀膜电极2 kW射频板条CO2激光器,电光转换效率平均为10.4%;裸铜电极2 kW射频板条CO2激光器,平均电光转换效率为6.5%。 The domestic high-power RF slab CO2 laser has no dielectric film on the surface of the copper electrode.The surface of the bare copper is easily oxidized during the discharge process.It is damaged by laser electronic sputtering.The waveguide loss is seriously,which affects the light output efficiency of the laser.In order to solve the above problems,the Al+Al2O3 hybrid waveguide dielectric film was developed.The composition of electrode film was analyzed and the anti-electron sputtering ability was tested.Experiments was conducted to detect the anomalous dispersion of CO2optical waves on the film surface.The micro analysis shows the film is composite of Al and O,the atomic ratio is over 2∶3,and the micro-structure is Al+Al2O3,which meets the design of electrode surface film structure;the reflectance under different incident angle was tested,when incident angle is between 10°to 170°,the highest reflectance of Al2O3 film surface to CO2 with a wavelength of 10.6 μm is 85%.Discharge test shows the average optical efficiency of coated electrode laser is 10.4%.However,that of naked Cu electrode laser is 6.5%.
作者 杨卫红 张雪 李建东 Yang Weihong;Zhang Xue;Li Jiandong(School of Mechanical and Electrical Engineering,Wetihua College,Wuhan,Hubei 430074,China;Information and Engineering School,Wuchang University of Technology,Wuhan,Hubei 430070,China;Xiaying Hospital,Jizhou Area,Tianjin 301900,China)
出处 《应用激光》 CSCD 北大核心 2019年第1期136-142,共7页 Applied Laser
基金 博士基金资助项目(项目编号:2014AAA02).
关键词 射频板条CO2激光器 Al+Al2O3波导介质膜 受激光电子溅射 激光损伤 波导损耗 RF slab CO2 laser Al+Al2O3 waveguide dielectric film laser electron sputtering laser damage waveguide loss
作者简介 杨卫红(1974-),女,博士,主要研究领域为工业激光器及其应用。E-mail:rose7636@163.com;通信作者:张雪(1978-),女,副教授,主要研究领域为激光通讯及工业激光器研究。E-mail:2816717914@qq.com.
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