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13.56 MHz/2 MHz柱状感性耦合等离子体参数的对比研究

Experimental investigation of plasma parameters in 13.56MHz/2 MHz cylindrical inductively coupled plasma
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摘要 通过Langmuir双探针和发射光谱诊断方法,对比研究了驱动频率为13.56 MHz和2 MHz柱状感性耦合等离子体中电子密度和电子温度的径向分布规律.结果表明:在高频和低频放电中,输入功率的增加对等离子体参数产生了不同的影响,高频放电中主要提升了电子密度,低频放电中则主要提升了电子温度.固定气压为10 Pa,分别由高频和低频驱动时,电子密度的径向分布均为'凸型'.而电子温度的分布差异比较明显,高频驱动时,电子温度在腔室中心较为平坦,在边缘略有上升;低频驱动时,电子温度随径向距离的增加而逐渐下降.为了进一步分析造成这种差异的原因,在相同放电条件下采集了氩等离子体的发射光谱图,利用分支比法计算了亚稳态粒子的数密度,发现电子温度的径向分布始终与亚稳态粒子的径向分布相反.继续升高气压到100 Pa,发现不论高频还是低频放电,电子密度的径向分布均从'凸型'转变为'马鞍形',较低气压时电子密度的均匀性有了一定的提升,但低频的均匀性更好. Inductively coupled plasmais widely used in semiconductor and display process because of its desirable characteristics such as high plasma density,simple structure and independently controllable ion energy.The driving frequency is a significant parameter that generates and maintains the plasma.However,the effects of different driving frequencies on the radial distribution of the plasma parameters are hardly investigated.So a large area cylindrical inductively coupled plasma source driven separately by 2 MHz and 13.56 MHz is investigated.In order to perform a comprehensive investigation about the effect of driving frequency,the radially resolved measurements of electron density,electron temperature and density of metastable state atoms for the argon discharge are systematically analyzed by Langmuir double probe and optical emission spectroscopy at various power values and gas pressures.It is found that input power values at high frequency(13.56 MHz)and low frequency(2 MHz)have different effects on plasma parameters.When discharge is driven at high frequency,the electron density increases obviously with the increase of power.However,when discharge is driven at low frequency,the electron temperature increases evidently with the increase of power.This can be explained by calculating the skin depths in high and low frequency discharge.When the discharge is driven at high frequency,the induced electromagnetic field is higher than that at low frequency,and the single electron obtains more energy.It is easier to ionize,so the energy is mainly used to increase the electron density.When the discharge is driven at low frequency,the skin layer is thicker,the number of heated electrons is larger,and the average energy of electrons is increased,so the energy is mainly used to raise the electron temperature.At a gas pressure of 10 Pa,the electron density shows a‘convex’distribution and increases with the increase of input power for both the high-frequency and low-frequency discharge.While the distributions of electron tempe
作者 张改玲 滑跃 郝泽宇 任春生 Zhang Gai-Ling;Hua Yue;Hao Ze-Yu;Ren Chun-Sheng(Key Laboratory of Materials Modification by Laser,Ion and Electron Beams,Dalian University of Technology,Dalian 116024,China)
出处 《物理学报》 SCIE EI CAS CSCD 北大核心 2019年第10期186-195,共10页 Acta Physica Sinica
基金 国家自然科学基金(批准号:11475038)资助的课题.
关键词 感性耦合等离子体 Langmuir双探针 发射光谱 等离子体参数 inductively coupled plasma Langmuir double probe optical emission spectroscopy plasma parameters
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