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渗氮+氧处理处理工艺 预览
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作者 薄鑫涛 《热处理》 CAS 2019年第2期60-61,共2页
渗氮过程中氧的加入大致有三种方式:渗氮前预氧化、渗氮后氧化、氧化渗氮同时进行(氧氮共渗、氮氧共渗)。1预氧化渗氮(预氧化催渗气体渗氮)气体渗氮在工业上应用广泛,但周期太长,人们不断努力探索新工艺,以缩短周期,预氧化就是其中的一... 渗氮过程中氧的加入大致有三种方式:渗氮前预氧化、渗氮后氧化、氧化渗氮同时进行(氧氮共渗、氮氧共渗)。1预氧化渗氮(预氧化催渗气体渗氮)气体渗氮在工业上应用广泛,但周期太长,人们不断努力探索新工艺,以缩短周期,预氧化就是其中的一例。预氧化渗氮就是在气体渗氮前进行一次规范的预氧化处理,使工件表面形成一层致密的Fe3O4氧化物薄膜,这层薄膜对随后氮的渗入起着加速作用,在保证渗氮效果的前提下,可缩短周期15%~30%(也有报道采用预氧化两段快速渗氮处理38CrMoAl钢或经预氧化多段变温快速气体渗氮,渗氮周期缩短50%以上),从而显著提高生产率,降低能耗和气耗。 展开更多
关键词 氧化处理 气体渗氮 工艺 38CRMOAL钢 氧化物薄膜 氧氮共渗 Fe3O4 短周期
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低温反应溅射沉积α-(Al,Cr)2O3膜
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作者 邱万奇 王书林 +3 位作者 程奕天 钟喜春 焦东玲 周克崧 《材料研究学报》 CSCD 北大核心 2018年第4期278-282,共5页
使用AlCr合金靶材在高功率脉冲磁控溅射系统中低温反应溅射沉积氧化物薄膜,并与使用纯Al靶反应溅射的薄膜对比。用纳米压痕仪测量薄膜的力学性能,使用扫描电镜(SEM)、掠入射X射线衍射(GIXRD)和能谱仪(EDS)等手段研究了沉积薄膜... 使用AlCr合金靶材在高功率脉冲磁控溅射系统中低温反应溅射沉积氧化物薄膜,并与使用纯Al靶反应溅射的薄膜对比。用纳米压痕仪测量薄膜的力学性能,使用扫描电镜(SEM)、掠入射X射线衍射(GIXRD)和能谱仪(EDS)等手段研究了沉积薄膜的表面形貌、相结构和元素组成。结果表明,反应溅射Al时靶表面火花放电严重且工艺不稳定,因此所沉积的薄膜表面粗糙、疏松,硬度低;而反应共溅射AlCr能抑制靶表面火花放电,沉积薄膜平整、致密且硬度高;在540℃和10%氧分压条件下,可沉积出α-(Al,Cr)2O3为主的刚玉型结构氧化物薄膜。 展开更多
关键词 材料表面与界面 氧化物薄膜 α-(Al Cr)2O3 高功率脉冲磁控溅射 A1Cr合金靶 纳米压痕
氧化锡基低辐射玻璃的辐射率改善途径分析 预览
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作者 刘起英 《建筑玻璃与工业玻璃》 2017年第10期2-4,共3页
掺杂F的氧化锡薄膜(FTO)是一种透明导电的氧化物薄膜,也是在线低辐射玻璃(Low—E)的功能膜,如何进一步降低其辐射率是一个重要课题。本文分析了辐射率的影响因素,对降低辐射率可以采取的措施进行了分析。分析表明,表面电阻是最... 掺杂F的氧化锡薄膜(FTO)是一种透明导电的氧化物薄膜,也是在线低辐射玻璃(Low—E)的功能膜,如何进一步降低其辐射率是一个重要课题。本文分析了辐射率的影响因素,对降低辐射率可以采取的措施进行了分析。分析表明,表面电阻是最主要影响因素,为了使辐射率ε小于0.1,必须使方块电阻R口小于8.1Ω/□;通过优化掺杂、改善膜系匹配、光辅助CVD等方法进一步提高结晶质量、表面平整度和堆积密度,可以进一步降低辐射率,优化在线Low—E玻璃的性能。 展开更多
关键词 低辐射玻璃 氧化物薄膜 辐射率 锡基 影响因素 氧化薄膜 表面平整度 透明导电
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Zinc tin oxide thin films prepared by MOCVD with different Sn/Zn ratios
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作者 Ying Xu Lin-Yan Hou Xiao-Meng Zhang 《稀有金属:英文版》 SCIE EI CAS CSCD 2017年第9期753-757,共5页
Zinc tin oxide(ZTO) thin films, with zinc acetate and tributyltin chloride as raw materials, were deposited on glass substrates by the method of metal organic chemical vapor deposition(MOCVD). The crystallization, mic... Zinc tin oxide(ZTO) thin films, with zinc acetate and tributyltin chloride as raw materials, were deposited on glass substrates by the method of metal organic chemical vapor deposition(MOCVD). The crystallization, microstructure and optical properties were investigated by scanning electronic microscope(SEM),X-ray diffraction(XRD) and ultraviolet-visible(UV-Vis)spectrophotometer. The results show that with the increase in Sn/Zn ratio, the crystal changes from wurtzite to rutile phase. When the ratio reaches 11:18,the intensity of Zn_2SnO_4 peaks appears to be the strongest and the optical band gap is about 3.27 eV. Calculated by the envelope method, the thickness of the ZTO thin films is 713.24 nm.Measured by UV-Vis spectrophotometer, the transmittance of the ZTO thin films reaches up to 80% in the wavelength range of 400-1000 nm when the Sn/Zn ratio is 7:18. 展开更多
关键词 MOCVD法 氧化物薄膜 氧化物 醋酸锌 金属有机化学气相沉积法 紫外-可见分光光度计 紫外可见分光光度计 扫描电子显微镜
Synthesis of monoclinic structure gallium oxide film on sapphire substrate by magnetron sputtering
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作者 Sun, Jian-xu Mi, Wei +6 位作者 Zhang, De-shuang Yang, Zheng-chun Zhang, Kai-liang Han, Ye-mei Yuan, Yu-jie Zhao, Jin-shi Li, Bo 《光电子快报:英文版》 EI 2017年第4期295-298,共4页
Gallium oxide(Ga_2O_3) films were deposited on singlecrystalline sapphire(0001) substrate by radio frequency(RF) magnetron sputtering technique in the temperature range of 300—500 °C. The microstructure of the ... Gallium oxide(Ga_2O_3) films were deposited on singlecrystalline sapphire(0001) substrate by radio frequency(RF) magnetron sputtering technique in the temperature range of 300—500 °C. The microstructure of the β-Ga_2O_3 films were investigated in detail using X-ray diffractometer(XRD) and scanning electron microscope(SEM). The results show that the film prepared at 500 °C exhibits the best crystallinity with a monoclinic structure(β-Ga_2O_3). Structure analysis reveals a clear out-of-plane orientation of β-Ga_2O_3(201) || Al_2O_3(0001). The average transmittance of these films in the visible wavelength range exceeds 90%, and the optical band gap of the films varies from 4.68 eV to 4.94 eV which were measured by an ultraviolet-visible-near infrared(UV-vis-NIR) spectrophotometer. Therefore, it is hopeful that the β-Ga_2O_3 film can be used in the UV optoelectronic devices. 展开更多
关键词 氧化物薄膜 蓝宝石衬底 单斜结构 氧化 磁控溅射法 紫外-可见分光光度计 扫描电子显微镜 合成
氧化物薄膜生长与计算机模拟概况 预览
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作者 陈畅子 姜海翔 《内江科技》 2016年第3期52-53,共2页
目前关于计算机模拟薄膜的生长的报道主要是以单金属薄膜的生长和多元化合物为主,而氧化物薄膜模拟报道很少。本文基于传统公认薄膜生长过程,介绍了氧化物薄膜的生长模式。同时,介绍了氧化物薄膜的影响因数和计算机模拟氧化物薄膜生长... 目前关于计算机模拟薄膜的生长的报道主要是以单金属薄膜的生长和多元化合物为主,而氧化物薄膜模拟报道很少。本文基于传统公认薄膜生长过程,介绍了氧化物薄膜的生长模式。同时,介绍了氧化物薄膜的影响因数和计算机模拟氧化物薄膜生长的三种主要方法及其应用特点,包括了速率方程理论、第一性原理分子动力学、蒙特卡罗方法,并详细介绍了当前国内外计算机模拟氧化物薄膜生长的研究现状。 展开更多
关键词 氧化物薄膜 计算机模拟 薄膜生长 分子动力学 生长模式 金属薄膜 第一性原理 速率方程 生长机制 蒙特卡罗方法
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Improved electrical and magnetic transport properties of Lao.sBa0.2MnO3 thin films by oxygen annealing
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作者 XiaoXia Chen GuoZhen Liu +6 位作者 Xia Zhu Jie Qiu JinLei Yao Meng Zhao YuCheng Jiang Run Zhao Ju Gao 《中国科学:物理学、力学、天文学英文版》 SCIE EI CAS CSCD 2016年第7期88-89,共2页
<正>Dear Editors,The properties of mixed-valence manganites are sensitive to the synthesis conditions[1].For oxide films grown by pulsed laser deposition(PLD),the physical properties are affected obviously by th... <正>Dear Editors,The properties of mixed-valence manganites are sensitive to the synthesis conditions[1].For oxide films grown by pulsed laser deposition(PLD),the physical properties are affected obviously by the growth oxygen pressure and annealing treatment[2-5].Using the PLD method,manganite oxides are usually grown at different oxygen pressures to investigate the 展开更多
关键词 氧化物薄膜 氧化物 输运性质 退火处理 PLD方法 脉冲激光沉积 合成条件 混合价态
Cu2O-based solar cells using oxide semiconductors
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作者 Tadatsugu Minami Yuki Nishi Toshihiro Miyata 《半导体学报:英文版》 EI CAS CSCD 2016年第1期38-46,共9页
We describe significant improvements of the photovoltaic properties that were achieved in Al-doped ZnO(AZO)/n-type oxide semiconductor/p-type Cu2O heterojunction solar cells fabricated using p-type Cu2O sheets prepa... We describe significant improvements of the photovoltaic properties that were achieved in Al-doped ZnO(AZO)/n-type oxide semiconductor/p-type Cu2O heterojunction solar cells fabricated using p-type Cu2O sheets prepared by thermally oxidizing Cu sheets. The multicomponent oxide thin film used as the n-type semiconductor layer was prepared with various chemical compositions on non-intentionally heated Cu2O sheets under various deposition conditions using a pulsed laser deposition method. In Cu2O-based heterojunction solar cells fabricated using various ternary compounds as the n-type oxide thin-film layer, the best photovoltaic performance was obtained with an n-ZnGa2O4 thin-film layer. In most of the Cu2O-based heterojunction solar cells using multicomponent oxides composed of combinations of various binary compounds, the obtained photovoltaic properties changed gradually as the chemical composition was varied. However, with the ZnO–MgO and Ga2O3–Al2O3systems, higher conversion efficiencies(á/ as well as a high open circuit voltage(Voc/ were obtained by using a relatively small amount of MgO or Al2O3, e.g.,(ZnO)0:91–(MgO)0:09 and(Ga2O3/0:975–(Al2O3/0:025, respectively. When Cu2O-based heterojunction solar cells were fabricated using Al2O3–Ga2O3–MgO–ZnO(AGMZO)multicomponent oxide thin films deposited with metal atomic ratios of 10, 60, 10 and 20 at.% for the Al, Ga, Mg and Zn, respectively, a high Vocof 0.98 V and an á of 4.82% were obtained. In addition, an enhanced á and an improved fill factor could be achieved in AZO/n-type multicomponent oxide/p-type Cu2O heterojunction solar cells fabricated using Na-doped Cu2O(Cu2O:Na) sheets that featured a resistivity controlled by optimizing the post-annealing temperature and duration. Consequently, an á of 6.25% and a Vocof 0.84 V were obtained in a Mg F2/AZO/n-(Ga2O3–Al2O3//p-Cu2O:Na heterojunction solar cell fabricated using a Cu2O:Na sheet with a resistivity of approximately 10 cm and a(Ga0:975Al0:025/2O3 thin film with a thickn 展开更多
关键词 氧化物半导体 太阳能电池 CU2O 电池使用 异质结太阳电池 化学成分变化 氧化物薄膜 Al2O3
被引量:1
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作者 Yong Zhong Yang Wang +13 位作者 Sha Han Yan-Feng Lv Wen-Lin Wang Ding Zhang Hao Ding Yi-Min Zhang Lili Wang Ke He Ruidan Zhong John A. Schneeloch Gen-Da Gu Can-Li Song Xu-Cun Ma Qi-Kun Xue 《中国科学通报:英文版》 SCIE CSCD 2016年第16期1239-1247,共9页
关键词 高温超导 氧化物 氧化物薄膜 节点 配对 扫描隧道显微镜 CuO2 凝聚态理学
烧结钕铁硼磁控溅射氧化物薄膜性能研究 预览
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作者 丁雪峰 吴耀金 《河北农机》 2016年第2期66-67,共2页
采用直流脉冲磁控溅射法,在烧结钕铁硼磁体表面沉积了厚度约为700nm的氧化锆、氧化铬、氧化铝、氧化钛薄膜。使用扫描电镜、纳米压痕仪分别表征了薄膜的形貌、硬度和弹性模量。采用电化学工作站测试了薄膜的动电位极化曲线,考查了其防... 采用直流脉冲磁控溅射法,在烧结钕铁硼磁体表面沉积了厚度约为700nm的氧化锆、氧化铬、氧化铝、氧化钛薄膜。使用扫描电镜、纳米压痕仪分别表征了薄膜的形貌、硬度和弹性模量。采用电化学工作站测试了薄膜的动电位极化曲线,考查了其防腐蚀性能。研究结果表明在施加离子束辅助条件下薄膜更加致密,性能较好。其中氧化钛薄膜硬度最高,达23Gpa。由于氧化铝薄膜为非晶结构,在防腐蚀能力方面表现更出色,相比于基底其腐蚀电流密度降低45倍之多。 展开更多
关键词 烧结钕铁硼 磁控溅射 氧化物薄膜
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Influence of Conductivity on Corrosion Behavior of 304 Stainless Steel in High Temperature Aqueous Environment
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作者 Jiazhen Wang Jianqiu Wang En-Hou Han 《材料科学技术学报:英文版》 SCIE EI CAS CSCD 2016年第4期333-340,共8页
高温度水里的 304 不锈钢(SS ) 的腐蚀行为上的电导率的影响被在原处使用 potentiodynamic 极化曲线调查,在 300 点的电气化学的阻抗系列(EIS )
关键词 304不锈钢 腐蚀行为 高温环境 电导率 X射线光电子能谱 电化学极化曲线 扫描电子显微镜 氧化物薄膜
铥激光器腔镜用高损伤阈值氧化物薄膜的研制 预览
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作者 赵阳 何宇 +5 位作者 焦宏飞 张锦龙 程鑫彬 刘华松 李刚正 吴晓鸣 《红外与激光工程》 EI CSCD 北大核心 2016年第5期118-123,共6页
2μm波段激光器在环境探测、测风雷达、生物组织切割、光电对抗等领域都有重要的应用价值和前景。而此波段的薄膜通常采用折射率较高的硫化物、砷化物等软膜材料来制备,为了提升该波段薄膜的损伤性能,采用折射率相对较低但能带隙更宽的... 2μm波段激光器在环境探测、测风雷达、生物组织切割、光电对抗等领域都有重要的应用价值和前景。而此波段的薄膜通常采用折射率较高的硫化物、砷化物等软膜材料来制备,为了提升该波段薄膜的损伤性能,采用折射率相对较低但能带隙更宽的氧化物材料来制备。利用傅里叶红外光谱仪和弱吸收测试仪分析表征了薄膜中OH基含量的多少和薄膜整体吸收的大小,通过优化工艺,成功制备出了满足2 020 nm的铥(Tm)激光器使用要求的多层介质薄膜。利用微分干涉显微镜观察了经过激光损伤测试薄膜的损伤形貌,结合薄膜中电场分布和应力测试结果,分析探讨了此薄膜的损伤机理,提出进一步优化薄膜损伤特性的方案。 展开更多
关键词 氧化物薄膜 2μm波段 激光损伤
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Modulation of physical properties of oxide thin films by multiple fields
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作者 杨华礼 王保敏 +3 位作者 朱小健 尚杰 陈斌 李润伟 《中国物理B:英文版》 SCIE EI CAS CSCD 2016年第6期9-28,共20页
Recent studies of the modulation of physical properties in oxide thin films by multiple fields are reviewed.Some of the key issues and prospects of this area of study are also addressed.Oxide thin films exhibit versat... Recent studies of the modulation of physical properties in oxide thin films by multiple fields are reviewed.Some of the key issues and prospects of this area of study are also addressed.Oxide thin films exhibit versatile physical properties such as magnetism,ferroelectricity,piezoelectricity,metal–insulator transition(MIT),multiferroicity,colossal magnetoresistivity,switchable resistivity.More importantly,the exhibited multifunctionality can be tuned by various external fields,which has enabled demonstration of novel electronic devices. 展开更多
关键词 氧化物薄膜 理性质 调制 金属绝缘体转变 巨磁电阻 多功能性 发展前景 电子器件
Polyvinylpyrrolidone/graphene oxide thin films coated on quartz crystal microbalance electrode for NH_3 detection at room temperature
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作者 MA XingFang XIE GuangZhong +3 位作者 SU YuanJie DU HongFei XIE Tao JIANG YaDong 《中国科学:技术科学英文版》 SCIE EI CAS CSCD 2016年第9期1377-1382,共6页
In this paper, composite film based on polyvinylpyrrolidone(PVP)/graphene oxide(GO) was fabricated by spray method on AT-cut 9.986 MHz quartz crystal microbalance(QCM) for NH3 sensing. The thin films were charac... In this paper, composite film based on polyvinylpyrrolidone(PVP)/graphene oxide(GO) was fabricated by spray method on AT-cut 9.986 MHz quartz crystal microbalance(QCM) for NH3 sensing. The thin films were characterized by scanning electron microscope(SEM), Fourier transform infrared spectroscopy(FTIR) and ultraviolet-visible spectroscopy(UV-VIS) to investigate the morphologies and the composition contents, respectively. The experimental results reveal that PVP/GO based sensor holds higher sensitivity, larger responsiveness and smaller baseline drift than those based on pure PVP at room temperature. Besides, the prepared sensor exhibits greater response to NH3 than other gases such as CO, CO2 and NO2 at the same concentration. The good linearity, reproducibility and stability demonstrate the practicability of PVP/GO hybrid film in detecting NH3. 展开更多
关键词 石英晶体微天平 聚乙烯吡咯烷酮 氧化物薄膜 氧化石墨 检测 傅里叶变换红外光谱 扫描电子显微镜 电极
Corrosion behaviors for peak-aged Mg-7Gd-5Y-1Nd-0.5Zr alloys with oxide films
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作者 Quan-Tong Jiang Kui Zhang +4 位作者 Xing-Gang Li Yong-Jun Li Ming-Long Ma Guo-Liang Shi Jia-Wei Yuan 《稀有金属:英文版》 SCIE EI CAS CSCD 2016年第10期758-762,共5页
The corrosion behaviors of T5(225℃,6.5 h)and T6(460℃,2 h + 225℃,12 h) peak-aged Mg-7Gd-5Y-lNd-0.5Zr alloys with oxide films were investigated by optical microscope(OM),scanning electron microscopy(SEM),and energy-d... The corrosion behaviors of T5(225℃,6.5 h)and T6(460℃,2 h + 225℃,12 h) peak-aged Mg-7Gd-5Y-lNd-0.5Zr alloys with oxide films were investigated by optical microscope(OM),scanning electron microscopy(SEM),and energy-dispersive spectroscopy(EDS).The weight loss rates and electrochemical tests were also analyzed.The thicknesses of T5 and T6 oxide films are roughly 0.6 and1.0 μm,respectively.The components of oxide films mainly consist of O,Mg,Y,Nd,and Gd,and the T6 oxide film results in surfaces with larger peaks than T5 oxide film.In addition,Y,Nd,and Gd peaks are all higher than those of Mg-7Gd-5YlNd-0.5Zr alloys,but Mg peak is consistently far below than that of the alloys.The specimens could be arranged in decreasing order of corrosion rates and corrosion current densities:T6 oxide film < T5 oxide film < T6 without oxide film < T5 without oxide film.The oxide films are compact to increase the corrosion resistance for Mg-7Gd-5Y-lNd-0.5Zr alloys,which will provide a guiding insight into the corrosion and protection of Mg-RE alloys in atmospheric environments. 展开更多
关键词 表面氧化 稀土镁合金 腐蚀行为 峰时效 扫描电子显微镜 腐蚀电流密度 光学显微镜 氧化物薄膜
离子束溅射氧化物薄膜的中红外特性 被引量:3
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作者 李定 熊胜明 《中国激光》 EI CAS CSCD 北大核心 2015年第1期219-223,共5页
以离子束溅射沉积(IBSD)方法制备了Al2O3、Nb2O5单层膜,用红外可变角度光谱椭圆偏振仪(IR-VASE)测试了薄膜的光学常数。用原子力显微镜(AFM)测量了单层膜的表面形貌及表面粗糙度,计算了单个表面的总积分散射(TIS)。以Nb2O5 和... 以离子束溅射沉积(IBSD)方法制备了Al2O3、Nb2O5单层膜,用红外可变角度光谱椭圆偏振仪(IR-VASE)测试了薄膜的光学常数。用原子力显微镜(AFM)测量了单层膜的表面形貌及表面粗糙度,计算了单个表面的总积分散射(TIS)。以Nb2O5 和Al2O3 为高低折射率材料设计并制备了2.7 μm 高反射膜。最后对单层膜进行了环境实验检测。结果表明,制备的薄膜在中红外波段具有高的折射率和低的消光系数,光滑的表面特性和极低的表面散射损耗;在2.7 μm 波段没有发现由于水吸收导致的消光系数的增大;制备的反射膜在2.7 μm 反射率达到了99.63%,接近于理论计算值。薄膜顺利通过了一系列环境实验,显示其优良的环境稳定性。 展开更多
关键词 薄膜 氧化物薄膜 离子束溅射 中红外 水吸收
Tradeoffbetween Narrowing Optical Band Gap and Enhancing Electrical Conductivity of the Metal Nanoparticles-Modified Titanium Oxide Films 预览
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作者 Aung Chan Thar Thaung Hlaing Win +1 位作者 Nyein Wint Lwin Than Zaw Oo 《物理科学与应用:英文版》 2015年第3期220-225,共6页
关键词 金属纳米粒子 氧化薄膜 光学带隙 改性膜 导电性 表面等离子体共振 铜纳米粒子 氧化物薄膜
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Defects-Driven Ferromagnetism in Undoped Dilute Magnetic Oxides: A Review
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作者 Shuai Ning Peng Zhan +2 位作者 Qian Xie Weipeng Wang Zhengjun Zhang 《材料科学技术学报:英文版》 SCIE EI CAS CSCD 2015年第10期969-978,共10页
在过去的几十年,冲淡磁性的半导体,特别地磁性的氧化物在半导体和铁磁物质的性质联合的 spintronic 设备由于他们的潜在的申请发展了进材料科学的一个重要分支的 dilute。尽管有在这些材料与高级居里温度奉献给强磁性的机制的一个主... 在过去的几十年,冲淡磁性的半导体,特别地磁性的氧化物在半导体和铁磁物质的性质联合的 spintronic 设备由于他们的潜在的申请发展了进材料科学的一个重要分支的 dilute。尽管有在这些材料与高级居里温度奉献给强磁性的机制的一个主要努力,它仍然是最争论的研究话题,特别在一系列 undoped wide-band-gap 氧化物电影或 nanostructures 给意外 d <sup>0</sup> 强磁性。最近,许多研究证明了在自发的磁性的订,但是矛盾的起源和控制的各种各样的缺点的关键角色从缠绕的理论计算看,实验要求更深入的系统的研究。在我们的以前的工作,可观的努力集中于二主要氧化物,即 ZnO 和 ZrO <sub>2</sub> 。这评论将介绍这缺点驱动的强磁性的当前的试验性的地位的一篇摘要在冲淡磁性的氧化物(DMO ) 。 展开更多
关键词 氧化物薄膜 铁磁性 面缺陷 掺杂 驱动 稀磁半导体 综述 自旋电子器件
Composition change and capacitance properties of ruthenium oxide thin film 预览
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作者 刘泓 甘卫平 +1 位作者 刘仲武 郑峰 《中南大学学报:英文版》 SCIE EI CAS CSCD 2015年第1期8-13,共6页
Ru O2·n H2O film was deposited on tantalum foils by electrodeposition and heat treatment using Ru Cl3·3H2O as precursor.Surface morphology, composition change and cyclic voltammetry from precursor to amorpho... Ru O2·n H2O film was deposited on tantalum foils by electrodeposition and heat treatment using Ru Cl3·3H2O as precursor.Surface morphology, composition change and cyclic voltammetry from precursor to amorphous and crystalline RuO2·n H2O films were studied by X-ray diffractometer, Fourier transformation infrared spectrometer, differential thermal analyzer, scanning electron microscope and electrochemical analyzer, respectively. The results show that the precursor was transformed gradually from amorphous to crystalline phase with temperature. When heat treated at 300 °C for 2h, RuO2·n H2O electrode surface gains mass of2.5 mg/cm2 with specific capacitance of 782 F/g. Besides, it is found that the specific capacitance of the film decreased by roughly20% with voltage scan rate increasing from 5 to 250 m V/s. 展开更多
关键词 氧化物薄膜 电容特性 组成变化 傅立叶变换红外光谱仪 扫描电子显微镜 RUO2 X射线衍射仪 电化学分析仪
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Transparent conductive reduced graphene oxide thin films produced by spray coating
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作者 SHI HongFei WANG Can +3 位作者 SUN ZhiPei ZHOU YueLiang JIN KuiJuan YANG GuoZhen 《中国科学:物理学、力学、天文学英文版》 SCIE EI CAS CSCD 2015年第1期42-46,共5页
Reduced graphene oxide thin films were fabricated on quartz by spray coating method using a stable dispersion of reduced graphene oxide in N,N-Dimethylformamide.The dispersion was produced by chemical reduction of gra... Reduced graphene oxide thin films were fabricated on quartz by spray coating method using a stable dispersion of reduced graphene oxide in N,N-Dimethylformamide.The dispersion was produced by chemical reduction of graphene oxide,and the film thickness was controlled with the amount of spray volume.AFM measurements revealed that the thin films have near-atomically flat surface.The chemical and structural parameters of the samples were analyzed by Raman and XPS studies.It was found that the thin films show electrical conductivity with good optical transparency in the visible to near infrared region.The sheet resistance of the films can be significantly reduced by annealing in vacuum and reach 58 k?with a light transmittance of 68.69%at 550 nm.The conductive transparent properties of the reduced graphene oxide thin films would be useful to develop flexible electronics. 展开更多
关键词 氧化物薄膜 透明导电性 喷涂法 石墨 N-二甲基甲酰胺 光学透明性 制作 化学还原
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